Product details
High purity synthetic quartz coating transparent quartz glass crucible
Now there are 2 sorts quartz glass products for semiconductors in China according to purity : molton from nature crystal ,impurity contents (Al, Fe,Ca ,Mg,Ti,Cu,Co,Ni ,K,Li,B ,etc ...) <50ppm,and molten through high temperature hydrolysis from high pure tetrachlosilane , impurity of these metals <2ppm, but this product is very expensive ,besides soft point is 80 ºC,lower than that of quartz glass made from rock low cost ,high soft point of quartz products and high purity of synthetic quartz glass made from rock crystal, and the crucible ,diffusion tube made from it become deformed in use . Our company using low cost ,high soft point of quartz products and high purity of synthetic quartz ,has produced the high purity synthetic quartz coating quartz glass products ,the technology is putting a layer of high pure synthetic quartz glass into the internal wall of crystal quartz glass through high temperature spray coating . Thus we have the advantages of both quartz glass products .
Chemical purity :
Content
Item |
Al |
Fe |
Ca |
Mg |
Ti |
Ni |
Cu |
K |
Na |
Mn |
Cr |
Li |
B |
Total Impurities |
| For glass |
12 |
1.7 |
3.4 |
1.2 |
1.3 |
<0.3 |
0.5 |
1.94 |
2.88 |
0.25 |
<3.0 |
0.1 |
0.25 |
24.85 |
| For coating |
0.37 |
0.31 |
0.27 |
0.04 |
0.03 |
0.03 |
0.01 |
0.5 |
0.5 |
<0.03 |
<0.03 |
<0.03 |
0.02 |
1.22 |
Size of transparent quartz glass crucibles for semiconductor
( with round and flat bottoms )
| Outside dia (D) |
Height (H) |
Radius of bottom (R) |
Thickness (S) |
Wall thickness tolerance at the same section |
| 80±0.5/0.8 |
60±2 |
D-1/2 |
2.0±0.5 |
0.3 |
| 90±0.5/0.8 |
70±2 |
D-1/2 |
2.0±0.5 |
0.3 |
| 100±0.5/1.0 |
80±3 |
D-1/2 |
2.3±0.5 |
0.3 |
| 106±0.5/1.0 |
90±3 |
D-1/2 |
2.3±0.5 |
0.3 |
| 114±0.5/1.0 |
75±3 |
D-1/2 |
2.3±0.5 |
0.3 |
| 130±0.5/1.0 |
110±3 |
D-1/2 |
2.5±0.5 |
0.4 |
| 134±0.5/1.0 |
110±3 |
D-1/2 |
2.5±0.5 |
0.4 |
| 153±0.5/2.0 |
153±3 |
D-1/2 |
3.0±0.5 |
0.4 |
| 178±0.5/5 |
178±3 |
D-1/2 |
3.0±0.5 |
0.4 |
| 203±0.5/5 |
203±3 |
D-1/2 |
3.0±0.5 |
0.4 |
Coating weight:
For quartz glass crucibles : according to plant standard ,coating weight inside crucible on every 100 cm2 no less than 1.44g ,if users requires more coating ,coating weight may be increased .
Other coatings and purified products :
Purified products : during diffusion inside tubes of semiconductor products and producing gallium arsenide monocrystal the diffusion of impurity ions inside wares causes pollution . In order to avoid pollution our company has used the technology of purifying quartz glass wares with hydrogen chloride under high temperature as a result ,the content of heavy metal impurities greatly decreased in purified products . When this kind of products was used for inside diffusion of silicon plate ,the life of ions of current carrier prolonged twice and more .
Al2O3 and SiC coating products : In order to increase temperature of used ( softened deformation ) temperature for diffuser ,coat a layer of high purity Al2O3 on the outer surface of diffuser and sinter it ,the deformation ratio of coated products under 1300 ºC will reduce by 60 % in comparing with no coated products ,when coat SiC --by 80 % . Besides of increasing used temperature of quartz glass tubes the outer surface coating can also prevent from foreign impurity ions permeating into inner wall of quartz glass tube and guarantee the quality of silicon plates .
Company Profile
